Consumbales & Spare Parts

Are you looking for consumables and spare parts? Look through our wide product range and you will find what you need.



Consumables
Sputter Target Gold

Sputtertarget Gold (Au)

  • Purity 99.99 %
  • Ø 54 x 2.0 mm
Art. No. 1000127
Sputter Target Gold

Sputtertarget Gold (Au)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300000
Sputter Target Gold

Sputtertarget Gold (Au)

  • Purity 99.99 %
  • Ø 54 x 0.2 mm
Art. No. 300017
Sputter Target Gold / Palladium

Sputtertarget Gold/Palladium 80/20 (Au/Pd)

  • Purity 99.99 %
  • Ø 54 x 0.2 mm
Art. No. 300001
Sputter Target Gold / Palladium

Sputtertarget Gold/Palladium 70/30 (Au/Pd)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300002
Sputter Target Gold / Palladium

Sputtertarget Gold/Palladium 60/40 (Au/Pd)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300003
Sputter Target Platinum

Sputtertarget Platinum (Pt)

  • Purity 99.95 %
  • Ø 54 x 0.2 mm
Art. No. 300004
Sputter target Silver

Sputtertarget Silver 60/40 (Ag)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300005
Sputter target Chromium

Sputtertarget Chromium (Cr)

  • Purity 99.95 %
  • Ø 54 x 0.5 mm
Art. No. 300006
Sputter target Nickel

Sputtertarget Nickel (Ni)

  • Purity 99.99 %
  • Ø 54 x 0.35 mm
Art. No. 300007
Sputter target Tungsten

Sputtertarget Tungsten (W)

  • Purity 99.95 %
  • Ø 54 x 1.0 mm
Art. No. 300008
Sputter target Carbon

Sputtertarget Carbon (C)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300009
Sputter target Aluminium

Sputtertarget Aluminium (Al)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300010
Sputter target Iron

Sputtertarget Iron (Fe)

  • Purity 99.95 %
  • Ø 54 x 0.35 mm
Art. No. 300011
putter target Indium Tin Oxide

Sputtertarget Indium Tin Oxide 90/10 (ITO)

  • Purity 99.99 %
  • Ø 54 x 2.0 mm
Art. No. 300012
Sputter target Copper

Sputtertarget Copper (Cu)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300013
Sputter target Titanium

Sputtertarget Titanium (Ti)

  • Purity 99.99 %
  • Ø 54 x 0.2 mm
Art. No. 300018
Sputter target Titanium

Sputtertarget Titanium (Ti)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300026
Sputter target Platinum/Irdium

Sputtertarget Platinum/Irdium (Pt/Ir)

  • Purity 99.95 %
  • Ø 54 x 1.0 mm
Art. No. 300019
Sputter target Platinum/Palladium

Sputtertarget Platinum/Palladium (Pt/Pd)

  • Purity 99.95 %
  • Ø 54 x 0.5 mm
Art. No. 300021
Sputter target Cobalt

Sputtertarget Cobalt (Co)

  • Purity 99.95 %
  • Ø 54 x 0.35 mm
Art. No. 300022
Sputter target Palladium

Sputtertarget Palladium (Pd)

  • Purity 99.95 %
  • Ø 54 x 0.3 mm
Art. No. 300023
sputter target Zinc

Sputtertarget Zinc (Zn)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 300024
putter target Tin

Sputtertarget Tin (Sn)

  • Purity 99.99 %
  • Ø 54 x 1.0 mm
Art. No. 1000123
sputter target Rhodium

Sputtertarget Rhodium (Rh)

  • Purity 99.95 %
  • Ø 54 x 0.2 mm
Art. No. 300025
sputter target Iridium

Sputtertarget Iridium (Ir)

  • Purity 99.95 %
  • Ø 54 x 1.0 mm
Art. No. 300020
sputter target Iridium

Sputtertarget Iridium (Ir)

  • Purity 99.99 %
  • Ø 54 x 0.3 mm
Art. No. 1000129
Carbon Thread

Carbon Thread on Coil

  • 2 m
Art. No. 300015
Quartz crystals

Quartz crystals

  • for film thickness monitor
  • set of 10 pc
Art. No. 1000175
Cleaning pads

Cleaning pads

Art. No. 1000157
Spare parts

Process Chamber

  • Borosilicate glass 3.3
  • glas chamber i.d. 104 mm, height 106 mm
  • fire polished and flamed edges
  • scale bar to indicate the working distance
Art. No. 400000

Implosion Guard

  • PMMA transparent
Art. No. 400001