| Turbo pump (Hi Pace 80) | |
| Speed ± 2 % | 90.000 min-1 |
| Final pressure according to PNEUROP | < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
| Turbo pump (Hi Pace 80) | |
| Speed ± 2 % | 90.000 min-1 |
| Final pressure according to PNEUROP | < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
